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? Micro System Integration Center (μSIC) What's New News and Events About the Center Our Mission Organization Chart A Message from the Chair Directions Links What's New 2021/11/09　November 9th We exhibit at SEMICON West (Dec. 7-9, 2021) for the first time. The event is hybrid that combines in-person and virtual. Our booth is virtual but is staffed during the event hours. The exhibition will include -Nanomachining/Ultra-high Sensitive Sensing/Smart Materials -Micro/nano Systems for Robot Control and Advanced Communication -Micro/nano Systems for Optics and Biomedical -Open facility "Hands-on-access fab" We welcome you to visit our booth! SEMICON West web site: 2015/1/27 January 27th Prof. Masayoshi Esashi was honored with IEEE Andrew S.Grove Award 2011/06/28 June 28th "MEMS intensive course in Kyoto" page launced 10/5/2010:　"μSIC symposium" page launched 8/18/2010:　 "Prototype Laundromat" home page launched 2010/07/27　"Micro System Integration Conference 2nd" page launched 2010/07/27　"MEMS intensive course in Tsukuba" page launched 2010/07/26　This web page was open. 2010/03/30　"Kickoff symposium" was held. 2015/11/17 November 17th Tohoku univ. Micro System Integration Center (uSIC) Symposium 2015 will be held in Sendai. 2019/3/4 March 4th Prof. Shunichiro Tanaka has been recognized as a Fellow of The Japan Institute of Metals and Materials. 2020/5/20 May 20th Hands-on-access fab (coin laundry) and Jun-ichi Nishizawa Memorial Research Center will reopen tomorrow. 2020/10/29　October 29th Assistant Professor Yukio Suzuki,Prof.Shuji Tanaka has been honored with the best technology paper award in Sensor Symposium Top Contact Site Map